HOLOGRAPHIC INTERFEROMETRY FOR VISUALIZATION OF VIBRATIONS OF MICROMECHANICAL STRUCTURES

Authors

  • Raimundas Vasiliauskas Law University of Lithuania
  • Ramutis Palevicius Kaunas University of Technology
  • Minvydas Ragulskis Kaunas University of Technology
  • Arvydas Palevicius Kaunas University of Technology
  • Giedrius Janusas Kaunas University of Technology

DOI:

https://doi.org/10.5755/j01.itc.32.3.11860

Abstract

The optical holography and digital holography methods for visualization of modes of vibrations of mic-romechanical systems are described. The Denisiuk holography approach and optoelectronic techniques for investi-gation MEMS with sub-micrometer accuracy, shape and changes in states of deformation of MEMS structures are proposed. Examples of holographic visualization of the vibration of links of MEMS are presented.

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Published

2004-09-30

Issue

Vol. 32 No. 3 (2004)

Section

Articles

License

Copyright terms are indicated in the Republic of Lithuania Law on Copyright and Related Rights, Articles 4-37.